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Annonce
Annonce
  1. Udbud
  2. Elektriske maskiner, apparatur, udstyr

Fakta om udbudet

EU-nr
Offentliggjort
26.01.2026
Udbudstype
Andre

Udbyder

Danmarks Tekniske Universitet - DTU

DUV Stepper

Danmarks Tekniske Universitet - DTU

56916-2026 - Direct award preannouncement
Denmark – Electronic, electromechanical and electrotechnical supplies – DUV Stepper
OJ S 17/2026 26/01/2026
Voluntary ex-ante transparency notice
Supplies
1. Buyer
1.1.
Buyer
Official name :  Danmarks Tekniske Universitet - DTU
Email :  kafre@dtu.dk
Legal type of the buyer :  Body governed by public law
Activity of the contracting authority :  Education
2. Procedure
2.1.
Procedure
Title :  DUV Stepper
Description :  To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper using a 248 nm wavelength laser as illumination source (KrF laser unit from CYMER). It must furthermore be possible to handle several different wafer types and sizes: Wafer materials: Silicon, LNOI, Borofloat, quartz, III-V Wafer sizes in diameter: 100mm, 150mm and 200mm, furthermore it must be equipped with a multi wafer handling kit such that easy switching between at least 150mm and 200mm wafers is possible without longer downtime for reconfiguration of the equipment. Wafer thickness to be handled are from 350µm up to 1000µm and they can come with a bow up to at least +/- 200um for some wafers. As well as wafers with either notch or primary and secondary flats. It should also be equipped with a through silicon alignment possibility. The equipment must further have the possibility of off-axis as well as dipole illumination. Reuse of existing reticles and easy transfer of existing job files from the DUV stepper FPA-3000EX4 are essential. Due to space restriction the footprint of the main body must not exceed 2000mm x 3000mm x 2700mm (W x D x H).
Procedure identifier :  105f4a16-bdff-4c1d-b211-91a36aea9413
Internal identifier :  9847
Type of procedure :  Negotiated without prior call for competition
2.1.1.
Purpose
Main nature of the contract :  Supplies
Main classification   ( cpv ):  31700000   Electronic, electromechanical and electrotechnical supplies
Additional classification   ( cpv ):  31000000   Electrical machinery, apparatus, equipment and consumables; lighting, 42000000   Industrial machinery, 42900000   Miscellaneous general and special-purpose machinery, 42990000   Miscellaneous special-purpose machinery, 73300000   Design and execution of research and development
2.1.2.
Place of performance
Postal address :  Ørsteds Plads    
Town :  Kgs. Lyngby
Postcode :  2800
Country subdivision (NUTS) :  Københavns omegn   ( DK012 )
Country :  Denmark
2.1.4.
General information
Additional information :  DTU Nanolab owns a DUV stepper FPA-3000EX4 equipped with a KrF laser delivering light with a wavelength of 248nm. The DUV stepper can realise patterns down to ca 160 nm with a throughput of more than 120 wafers/hour. It is a former production equipment from 1998 that DTU Nanolab purchased in 2012. Due to the high throughput and reproducibility, the DUV stepper is heavily used by small and medium sized companies for small scale production and development. The equipment is also used by research groups who need structures in the 200nm range with high reproducibility and high coverage of larger areas on 4”, 6” and 8” wafers. Due to the age of the DUV stepper we are more often experiencing faults that can be connected to the age of the equipment (like communication errors and worn-out parts) and it is getting more difficult if not impossible to get spare parts for reparations and general maintenance. To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper.
Legal basis : 
Directive 2014/24/EU
The Danish Public Procurement Law   - The Danish Public Procurement Act.
5. Lot
5.1.
Lot :  LOT-0000
Title :  DUV Stepper
Description :  To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper using a 248 nm wavelength laser as illumination source (KrF laser unit from CYMER). It must furthermore be possible to handle several different wafer types and sizes: Wafer materials: Silicon, LNOI, Borofloat, quartz, III-V Wafer sizes in diameter: 100mm, 150mm and 200mm, furthermore it must be equipped with a multi wafer handling kit such that easy switching between at least 150mm and 200mm wafers is possible without longer downtime for reconfiguration of the equipment. Wafer thickness to be handled are from 350µm up to 1000µm and they can come with a bow up to at least +/- 200um for some wafers. As well as wafers with either notch or primary and secondary flats. It should also be equipped with a through silicon alignment possibility. The equipment must further have the possibility of off-axis as well as dipole illumination. Reuse of existing reticles and easy transfer of existing job files from the DUV stepper FPA-3000EX4 are essential. Due to space restriction the footprint of the main body must not exceed 2000mm x 3000mm x 2700mm (W x D x H).
Internal identifier :  9847
5.1.1.
Purpose
Main nature of the contract :  Supplies
Main classification   ( cpv ):  31700000   Electronic, electromechanical and electrotechnical supplies
Additional classification   ( cpv ):  31000000   Electrical machinery, apparatus, equipment and consumables; lighting, 42000000   Industrial machinery, 42900000   Miscellaneous general and special-purpose machinery, 42990000   Miscellaneous special-purpose machinery, 73300000   Design and execution of research and development
Options : 
Description of the options :  Options Hardware: 2-1) TSA (Through Silicon Alignment) option 2-2) Z-SPIN Reticle (875-03) 2-3) 6inch Flat /8inch Notch multi-inch size special wafer chuck 2-4) 6inch Flat /8inch Notch multi-inch size special wafer chuck (Spare) 2-5) Secondary flat dedicated 6inch wafer chuck 2-6) Secondary flat dedicated 6inch wafer chuck 2-7) 6inch/8inch multi-inch size special wafer handling kit 2-8) Reticle Cassettes (for 6inch, 14pcs) Software: 2-9) PENSVA, PENSVABAR 2-10) Manual TVPA (MATVFUNC) 2-11) License package for transparent wafers (CHTRPA. SIONGIN) 2-12) AUTOPM (AUTOPM, QBLOCK) 2-13) Video Server (RAAMON) 2-14) PC Remote Console (Multi) *Hardware needs to be prepared by DTU 2-15) Recipe Server Software *Hardware needs to be prepared by DTU
5.1.2.
Place of performance
Postal address :  Ørsteds Plads    
Town :  Kgs. Lyngby
Postcode :  2800
Country subdivision (NUTS) :  Københavns omegn  ( DK012 )
Country :  Denmark
5.1.3.
Estimated duration
Duration :  1   Year
5.1.6.
General information
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) :  yes
Additional information :  DTU Nanolab owns a DUV stepper FPA-3000EX4 equipped with a KrF laser delivering light with a wavelength of 248nm. The DUV stepper can realise patterns down to ca 160 nm with a throughput of more than 120 wafers/hour. It is a former production equipment from 1998 that DTU Nanolab purchased in 2012. Due to the high throughput and reproducibility, the DUV stepper is heavily used by small and medium sized companies for small scale production and development. The equipment is also used by research groups who need structures in the 200nm range with high reproducibility and high coverage of larger areas on 4”, 6” and 8” wafers. Due to the age of the DUV stepper we are more often experiencing faults that can be connected to the age of the equipment (like communication errors and worn-out parts) and it is getting more difficult if not impossible to get spare parts for reparations and general maintenance. To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper.
5.1.15.
Techniques
Framework agreement : 
No framework agreement
Information about the dynamic purchasing system : 
No dynamic purchase system
5.1.16.
Further information, mediation and review
Review organisation :  Klagenævnet for Udbud
Information about review deadlines : Complaint regarding direct award of contract: Complaint that the Contracting Authority, contrary to the Public Procurement Act, has concluded a contract without prior publication of a contract notice in the European Union Official Journal must be submitted no later than 30 calendar days from the date after a contract award notice has been published by the Contracting Authority in the European Union Official Journal and that contract award notice includes the grounds for the decision to award the contract directly, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, section 3.
Organisation providing additional information about the procurement procedure :  Danmarks Tekniske Universitet - DTU
Organisation providing offline access to the procurement documents :  Danmarks Tekniske Universitet - DTU
Organisation providing more information on the review procedures :  Konkurrence- og Forbrugerstyrelsen
Organisation whose budget is used to pay for the contract :  Danmarks Tekniske Universitet - DTU
Organisation executing the payment :  Danmarks Tekniske Universitet - DTU
Organisation signing the contract :  Danmarks Tekniske Universitet - DTU
6. Results
Direct award : 
Justification for direct award :  The contract can be provided only by a particular economic operator because of an absence of competition for technical reasons
Other justification :  DTU needs a flexible tool for research and small-scale production with a 248 nm wavelength laser. As a part of our market survey, we have been in contact with the known suppliers of DUV steppers, but Canon is the only possible supplier. To our knowledge there is therefore only one supplier on the market that can deliver a DUV stepper with the required specifications.
6.1.
Result lot identifier :  LOT-0000
6.1.2.
Information about winners
Winner : 
Official name :  Canon Europe N.V.
Tender : 
Tender identifier :  Canon Europe N.V.
Identifier of lot or group of lots :  LOT-0000
Value of the tender :  6 675 000,00   EUR
Subcontracting :  Not yet known
Contract information : 
Identifier of the contract :  Canon Europe N.V.
Date on which the winner was chosen :  23/01/2026
Information about European Union funds : 
Organisation signing the contract :  Danmarks Tekniske Universitet - DTU
8. Organisations
8.1.
ORG-0001
Official name :  Danmarks Tekniske Universitet - DTU
Registration number :  30060946
Postal address :  Anker Engelunds Vej 1
Town :  Kgs. Lyngby
Postcode :  2800
Country subdivision (NUTS) :  Københavns omegn  ( DK012 )
Country :  Denmark
Contact point :  Katrine Freiesleben Petersen
Email :  kafre@dtu.dk
Telephone :  +45 45252525
Internet address :  https://www.dtu.dk
Roles of this organisation : 
Buyer
Organisation providing additional information about the procurement procedure
Organisation providing offline access to the procurement documents
Organisation signing the contract
Organisation whose budget is used to pay for the contract
Organisation executing the payment
8.1.
ORG-0002
Official name :  Klagenævnet for Udbud
Registration number :  37795526
Postal address :  Nævnenes hus, Toldboden 2
Town :  Viborg
Postcode :  8800
Country subdivision (NUTS) :  Østjylland  ( DK042 )
Country :  Denmark
Email :  klfu@erst.dk
Telephone :  +45 35291000
Internet address :  http://www.klfu.dk
Roles of this organisation : 
Review organisation
8.1.
ORG-0003
Official name :  Konkurrence- og Forbrugerstyrelsen
Registration number :  10294819
Postal address :  Carl Jacobsens Vej 35
Town :  Valby
Postcode :  2500
Country subdivision (NUTS) :  Byen København  ( DK011 )
Country :  Denmark
Email :  kfst@kfst.dk
Telephone :  +45 41715000
Internet address :  http://www.kfst.dk
Roles of this organisation : 
Organisation providing more information on the review procedures
8.1.
ORG-0004
Official name :  Canon Europe N.V.
Size of the economic operator :  Micro, small, or medium
Postal address :  Bovenkerkerweg 59
Town :  Amstelveen
Postcode :  1185XB
Country subdivision (NUTS) :  Groot-Amsterdam  ( NL32B )
Country :  Netherlands
Contact point :  Tomoya Kishi
Roles of this organisation : 
Tenderer
Winner of these lots :  LOT-0000
8.1.
ORG-0005
Official name :  Mercell Holding ASA
Registration number :  980921565
Postal address :  Askekroken 11
Town :  Oslo
Postcode :  0277
Country subdivision (NUTS) :  Oslo  ( NO081 )
Country :  Norway
Contact point :  eSender
Telephone :  +47 21018800
Fax :  +47 21018801
Internet address :  http://mercell.com/
Roles of this organisation : 
TED eSender
Notice information
Notice identifier/version :  e707f108-c3a7-4b6f-a851-1e317a5cee54   -   01
Form type :  Direct award preannouncement
Notice type :  Voluntary ex-ante transparency notice
Notice subtype :  25
Notice dispatch date :  23/01/2026   12:12:36 (UTC+00:00) Western European Time, GMT
Notice dispatch date (eSender) :  23/01/2026   12:30:42 (UTC+00:00) Western European Time, GMT
Languages in which this notice is officially available :  English
Notice publication number :  56916-2026
OJ S issue number :  17/2026
Publication date :  26/01/2026
Annonce Annonce
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